European application, no grantEurope
Method of generating euv radiation, method of manufacturing a device by means of said radiation, euv radiation source unit, and lithographic projection apparatus provided with such a radiation source unit
EP 1157597 A1 · Applicant: Koninklijke Philips Electronics N.V.
Overview
The published document from the EPO: abstract, claims, description and drawings. Open it full size
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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed December 13, 2000 and never granted as a European patent. Had it been granted, its 20-year term would have ended December 13, 2020.
- A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by June 13, 2026.
- We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledDecember 13, 2000
PublishedNovember 28, 2001
GrantedNever granted
Term endedDecember 13, 2020
Application numberEP 00991790
Classification (CPC)H05G2/0082 +2 more
Timeline
Timeline From EPO dates
Sources & verification
Official EPO records
Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.