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European application, no grantEurope

Gas distribution plate assembly for providing laminar gas flow across the surface of a substrate

EP 1150331 A2 · Applicant: Axcelis Technologies, Inc.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed April 25, 2001 and never granted as a European patent. Had it been granted, its 20-year term would have ended April 25, 2021.
  • Supplementary protection certificates extend only medicine and crop-protection patents, and it isn't classified as either.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledApril 25, 2001
PublishedOctober 31, 2001
GrantedNever granted
Term endedApril 25, 2021
Application numberEP 01303758
Classification (CPC)C23C16/45565 +1 more

Timeline

Timeline From EPO dates

2002200420062008201020122014201620182020Application filedApril 25, 2001PublishedOct 31, 2001Term endedApril 25, 2021

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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