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Expired European patentEurope

Wafer rotary holding apparatus and wafer surface treatment apparatus with waste liquid recovery mechanism

EP 1083589 B1 · Applicant: Mimasu Semiconductor Industry Company Limited

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed September 6, 2000 and granted October 31, 2012. A European patent lasts at most 20 years from filing, so its term ended September 6, 2020.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by March 6, 2026.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledSeptember 6, 2000
PublishedMarch 14, 2001
GrantedOctober 31, 2012
Term endedSeptember 6, 2020
Application numberEP 00119294
Classification (CPC)H10P72/78 +1 more

Timeline

Timeline From EPO dates

2001200320052007200920112013201520172019Application filedSep 6, 2000PublishedMarch 14, 2001Patent grantedOct 31, 2012Term endedSep 6, 2020

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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