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Expired European patentEurope

Stepper lens aberration measurement pattern and stepper lens aberration characteristics evaluating method

EP 1081483 B1 · Applicant: Oki Electric Industry Company, Limited

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 16, 2000 and granted January 19, 2011. A European patent lasts at most 20 years from filing, so its term ended March 16, 2020.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by September 16, 2025.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 16, 2000
PublishedMarch 7, 2001
GrantedJanuary 19, 2011
Term endedMarch 16, 2020
Application numberEP 00302145
Classification (CPC)G03F7/706 +1 more

Timeline

Timeline From EPO dates

2001200320052007200920112013201520172019Application filedMarch 16, 2000PublishedMarch 7, 2001Patent grantedJan 19, 2011Term endedMarch 16, 2020

Sources & verification

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Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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