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Expired European patentEurope

Method and apparatus for modifying the profile of high-aspect-ratio gaps using differential plasma power

EP 1071833 B1 · Applicant: Applied Materials, Inc.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed April 5, 1999 and granted September 7, 2005. A European patent lasts at most 20 years from filing, so its term ended April 5, 2019.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by October 5, 2024.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledApril 5, 1999
PublishedJanuary 31, 2001
GrantedSeptember 7, 2005
Term endedApril 5, 2019
Application numberEP 99916440
Classification (CPC)C23C16/52 +2 more

Timeline

Timeline From EPO dates

2000200220042006200820102012201420162018Application filedApril 5, 1999PublishedJan 31, 2001Patent grantedSep 7, 2005Term endedApril 5, 2019

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

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Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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