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Thermal reaction chamber for semiconductor wafer processing operations

EP 1067588 A2 · Applicant: APPLIED MATERIALS, INC.

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed February 28, 1994 and never granted as a European patent. Had it been granted, its 20-year term would have ended February 28, 2014.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by August 28, 2019.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledFebruary 28, 1994
PublishedJanuary 10, 2001
GrantedNever granted
Term endedFebruary 28, 2014
Application numberEP 00121439
Classification (CPC)H10P72/7626 +2 more

Timeline

Timeline From EPO dates

1995199719992001200320052007200920112013Application filedFeb 28, 1994PublishedJan 10, 2001Term endedFeb 28, 2014

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.