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Method of manufacturing a semiconductor device in a silicon body, a surface of said silicon body being provided with an alignment grating and an at least partially recessed oxide pattern

EP 1046192 A1 · Applicant: Koninklijke Philips Electronics N.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed September 22, 1999 and never granted as a European patent. Had it been granted, its 20-year term would have ended September 22, 2019.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by March 22, 2025.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledSeptember 22, 1999
PublishedOctober 25, 2000
GrantedNever granted
Term endedSeptember 22, 2019
Application numberEP 99948826
Classification (CPC)G03F9/70 +1 more

Timeline

Timeline From EPO dates

2000200220042006200820102012201420162018Application filedSep 22, 1999PublishedOct 25, 2000Term endedSep 22, 2019

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