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Expired European patentEurope

Plasma cleaning process for openings formed in one or more low dielectric constant insulation layers over copper metallization integrated circuit structures

EP 1041614 B1 · Applicant: LSI LOGIC CORPORATION

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 29, 2000 and granted August 11, 2004. A European patent lasts at most 20 years from filing, so its term ended March 29, 2020.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by September 29, 2025.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 29, 2000
PublishedOctober 4, 2000
GrantedAugust 11, 2004
Term endedMarch 29, 2020
Application numberEP 00302590
Classification (CPC)H10W20/081 +2 more

Timeline

Timeline From EPO dates

2001200320052007200920112013201520172019Application filedMarch 29, 2000PublishedOct 4, 2000Patent grantedAug 11, 2004Term endedMarch 29, 2020

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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