Patent Yard Sign in
Expired European patentEurope

Apparatus for the deposition of coatings on a substrate using a magnetically confined inductively coupled plasma source

EP 1020892 B1 · Applicant: "VLAAMSE INSTELLING VOOR TECHNOLOGISCH ONDERZOEK", afgekort "V.I.T.O."

EPO PDF

Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed January 14, 1999 and granted August 18, 2004. A European patent lasts at most 20 years from filing, so its term ended January 14, 2019.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by July 14, 2024.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJanuary 14, 1999
PublishedJuly 19, 2000
GrantedAugust 18, 2004
Term endedJanuary 14, 2019
Application numberEP 99870006
Classification (CPC)H01J37/32082 +2 more

Timeline

Timeline From EPO dates

2000200220042006200820102012201420162018Application filedJan 14, 1999PublishedJuly 19, 2000Patent grantedAug 18, 2004Term endedJan 14, 2019

Sources & verification