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Expired European patentEurope

Projection lithography with servo control

EP 1018669 B1 · Applicant: ASM LITHOGRAPHY B.V.

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed December 29, 1999 and granted March 1, 2006. A European patent lasts at most 20 years from filing, so its term ended December 29, 2019.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by June 29, 2025.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledDecember 29, 1999
PublishedJuly 12, 2000
GrantedMarch 1, 2006
Term endedDecember 29, 2019
Application numberEP 99310625
Classification (CPC)G03F7/70691 +1 more

Timeline

Timeline From EPO dates

2000200220042006200820102012201420162018Application filedDec 29, 1999PublishedJuly 12, 2000Patent grantedMarch 1, 2006Term endedDec 29, 2019

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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