Expired European patentEurope
Vacuum plasma processor having coil with added conducting segments to its peripheral part
EP 1018135 B1 · Applicant: LAM RESEARCH CORPORATION
Overview
The published document from the EPO: abstract, claims, description and drawings. Open it full size
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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed September 16, 1998 and granted February 10, 2010. A European patent lasts at most 20 years from filing, so its term ended September 16, 2018.
- A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by March 16, 2024.
- We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledSeptember 16, 1998
PublishedJuly 12, 2000
GrantedFebruary 10, 2010
Term endedSeptember 16, 2018
Application numberEP 98948202
Classification (CPC)H01J37/321
Timeline
Timeline From EPO dates
Sources & verification
Official EPO records
Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.