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Expired European patentEurope

Gas injection system for plasma processing apparatus

EP 1017876 B1 · Applicant: LAM RESEARCH CORPORATION

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed June 30, 1998 and granted March 16, 2005. A European patent lasts at most 20 years from filing, so its term ended June 30, 2018.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by December 30, 2023.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJune 30, 1998
PublishedJuly 12, 2000
GrantedMarch 16, 2005
Term endedJune 30, 2018
Application numberEP 98931773
Classification (CPC)C23C16/455 +2 more

Timeline

Timeline From EPO dates

1999200120032005200720092011201320152017Application filedJune 30, 1998PublishedJuly 12, 2000Patent grantedMarch 16, 2005Term endedJune 30, 2018

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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