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Expired European patentEurope

Data-conversion method for a multibeam laser writer for very complex microlithographic patterns

EP 1012783 B1 · Applicant: MICRONIC LASER SYSTEMS AB

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed February 26, 1998 and granted June 18, 2003. A European patent lasts at most 20 years from filing, so its term ended February 26, 2018.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by August 26, 2023.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledFebruary 26, 1998
PublishedJune 28, 2000
GrantedJune 18, 2003
Term endedFebruary 26, 2018
Application numberEP 98908378
Classification (CPC)G03F7/704 +1 more

Timeline

Timeline From EPO dates

1999200120032005200720092011201320152017Application filedFeb 26, 1998PublishedJune 28, 2000Patent grantedJune 18, 2003Term endedFeb 26, 2018

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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