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Expired European patentEurope

5 micron high acute cavity with channel by oxidizing fusion bonding of silicon substrates and stop etching

EP 1012552 B1 · Applicant: LUCAS NOVASENSOR INC.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed October 6, 1997 and granted June 30, 2004. A European patent lasts at most 20 years from filing, so its term ended October 6, 2017.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by April 6, 2023.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledOctober 6, 1997
PublishedJune 28, 2000
GrantedJune 30, 2004
Term endedOctober 6, 2017
Application numberEP 97910711
Classification (CPC)G01L9/0042

Timeline

Timeline From EPO dates

1998200020022004200620082010201220142016Application filedOct 6, 1997PublishedJune 28, 2000Patent grantedJune 30, 2004Term endedOct 6, 2017

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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