Patent Yard Sign in
Expired European patentEurope

Method for etching a conductive layer

EP 1010203 B1 · Applicant: LAM RESEARCH CORPORATION

EPO PDF

Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed March 17, 1998 and granted October 15, 2003. A European patent lasts at most 20 years from filing, so its term ended March 17, 2018.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by September 17, 2023.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 17, 1998
PublishedJune 21, 2000
GrantedOctober 15, 2003
Term endedMarch 17, 2018
Application numberEP 98911722
Classification (CPC)H10P50/267 +1 more

Timeline

Timeline From EPO dates

1999200120032005200720092011201320152017Application filedMarch 17, 1998PublishedJune 21, 2000Patent grantedOct 15, 2003Term endedMarch 17, 2018

Sources & verification