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Expired European patentEurope

Cleaning and drying method and apparatus for objects to be processed

EP 0886301 B1 · Applicant: Tokyo Electron Limited

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed June 16, 1998 and granted August 22, 2007. A European patent lasts at most 20 years from filing, so its term ended June 16, 2018.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by December 16, 2023.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJune 16, 1998
PublishedDecember 23, 1998
GrantedAugust 22, 2007
Term endedJune 16, 2018
Application numberEP 98110974
Classification (CPC)H10P72/0406

Timeline

Timeline From EPO dates

1999200120032005200720092011201320152017Application filedJune 16, 1998PublishedDec 23, 1998Patent grantedAug 22, 2007Term endedJune 16, 2018

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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