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A method of determining a wafer characteristic using a film thickness monitor

EP 0874396 A2 · Applicant: Applied Materials, Inc.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed April 23, 1998 and never granted as a European patent. Had it been granted, its 20-year term would have ended April 23, 2018.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by October 23, 2023.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledApril 23, 1998
PublishedOctober 28, 1998
GrantedNever granted
Term endedApril 23, 2018
Application numberEP 98303150
Classification (CPC)H10P74/203

Timeline

Timeline From EPO dates

1999200120032005200720092011201320152017Application filedApril 23, 1998PublishedOct 28, 1998Term endedApril 23, 2018

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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