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Expired European patentEurope

Multiple detector alignment system for photolithography

EP 0871072 B1 · Applicant: SVG LITHOGRAPHY SYSTEMS, INC.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 18, 1998 and granted October 17, 2007. A European patent lasts at most 20 years from filing, so its term ended March 18, 2018.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by September 18, 2023.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 18, 1998
PublishedOctober 14, 1998
GrantedOctober 17, 2007
Term endedMarch 18, 2018
Application numberEP 98104927
Classification (CPC)G03F7/70591 +2 more

Timeline

Timeline From EPO dates

1999200120032005200720092011201320152017Application filedMarch 18, 1998PublishedOct 14, 1998Patent grantedOct 17, 2007Term endedMarch 18, 2018

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

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