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Expired European patentEurope

Process for plasma enhanced anneal of titanium nitride

EP 0832311 B1 · Applicant: Tokyo Electron Limited

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed May 28, 1996 and granted July 14, 1999. A European patent lasts at most 20 years from filing, so its term ended May 28, 2016.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by November 28, 2021.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMay 28, 1996
PublishedApril 1, 1998
GrantedJuly 14, 1999
Term endedMay 28, 2016
Application numberEP 96916686
Classification (CPC)H10P95/00

Timeline

Timeline From EPO dates

1997199920012003200520072009201120132015Application filedMay 28, 1996PublishedApril 1, 1998Patent grantedJuly 14, 1999Term endedMay 28, 2016

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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