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Expired European patentEurope

Method and apparatus for low temperature deposition of cvd and pecvd films

EP 0763149 B1 · Applicant: Tokyo Electron Limited

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed November 29, 1994 and granted October 28, 1998. A European patent lasts at most 20 years from filing, so its term ended November 29, 2014.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by May 29, 2020.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledNovember 29, 1994
PublishedMarch 19, 1997
GrantedOctober 28, 1998
Term endedNovember 29, 2014
Application numberEP 95904143
Classification (CPC)C23C16/4417 +2 more

Timeline

Timeline From EPO dates

1995199719992001200320052007200920112013Application filedNov 29, 1994PublishedMarch 19, 1997Patent grantedOct 28, 1998Term endedNov 29, 2014

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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