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Expired European patentEurope

Process for producing thin films by means of reactive sputtering and device for implementing it

EP 0751236 B1 · Applicant: FORSCHUNGSZENTRUM JÜLICH GMBH

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed February 13, 1993 and granted July 24, 2002. A European patent lasts at most 20 years from filing, so its term ended February 13, 2013.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by August 13, 2018.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledFebruary 13, 1993
PublishedJanuary 2, 1997
GrantedJuly 24, 2002
Term endedFebruary 13, 2013
Application numberEP 96113800
Classification (CPC)C23C14/54 +1 more

Timeline

Timeline From EPO dates

1994199619982000200220042006200820102012Application filedFeb 13, 1993PublishedJan 2, 1997Patent grantedJuly 24, 2002Term endedFeb 13, 2013

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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