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Expired European patentEurope

Method for etching silicon oxide layers using mixtures of HF and carboxylic acid

EP 0698282 B1 · Applicant: INTERUNIVERSITAIR MICRO-ELEKTRONICA CENTRUM VZW

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed May 10, 1994 and granted September 6, 2000. A European patent lasts at most 20 years from filing, so its term ended May 10, 2014.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by November 10, 2019.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMay 10, 1994
PublishedFebruary 28, 1996
GrantedSeptember 6, 2000
Term endedMay 10, 2014
Application numberEP 94916954
Classification (CPC)H10P50/283 +1 more

Timeline

Timeline From EPO dates

1995199719992001200320052007200920112013Application filedMay 10, 1994PublishedFeb 28, 1996Patent grantedSep 6, 2000Term endedMay 10, 2014

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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