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Expired European patentEurope

Heating apparatus for semiconductor wafers or substrates

EP 0695922 B1 · Applicant: Applied Materials, Inc.

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed January 18, 1991 and granted November 21, 2001. A European patent lasts at most 20 years from filing, so its term ended January 18, 2011.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by July 18, 2016.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJanuary 18, 1991
PublishedFebruary 7, 1996
GrantedNovember 21, 2001
Term endedJanuary 18, 2011
Application numberEP 95112517
Classification (CPC)C30B25/10 +2 more

Timeline

Timeline From EPO dates

1992199419961998200020022004200620082010Application filedJan 18, 1991PublishedFeb 7, 1996Patent grantedNov 21, 2001Term endedJan 18, 2011

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.