Patent Yard Sign in
European application, no grantEurope

Trench etching in an integrated-circuit semiconductor device

EP 0694959 A2 · Applicant: AT&T Corp.

EPO PDF

Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Google PatentsEPO PDF

Why it's free to use

  • Filed June 26, 1990 and never granted as a European patent. Had it been granted, its 20-year term would have ended June 26, 2010.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by December 26, 2015.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJune 26, 1990
PublishedJanuary 31, 1996
GrantedNever granted
Term endedJune 26, 2010
Application numberEP 95115665
Classification (CPC)H10P50/242 +2 more

Timeline

Timeline From EPO dates

1991199319951997199920012003200520072009Application filedJune 26, 1990PublishedJan 31, 1996Term endedJune 26, 2010

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.