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Expired European patentEurope

A method of operating a high density plasma CVD reactor with combined inductive and capacitive coupling

EP 0680072 B1 · Applicant: APPLIED MATERIALS, INC.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed April 26, 1995 and granted October 8, 2003. A European patent lasts at most 20 years from filing, so its term ended April 26, 2015.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by October 26, 2020.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledApril 26, 1995
PublishedNovember 2, 1995
GrantedOctober 8, 2003
Term endedApril 26, 2015
Application numberEP 95302801
Classification (CPC)H01J37/32082 +2 more

Timeline

Timeline From EPO dates

1996199820002002200420062008201020122014Application filedApril 26, 1995PublishedNov 2, 1995Patent grantedOct 8, 2003Term endedApril 26, 2015

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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