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Expired European patentEurope

Process and apparatus for etching semiconductor wafers

EP 0673545 B1 · Applicant: MEMC Electronic Materials, Inc.

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed October 11, 1994 and granted December 16, 1998. A European patent lasts at most 20 years from filing, so its term ended October 11, 2014.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by April 11, 2020.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledOctober 11, 1994
PublishedSeptember 27, 1995
GrantedDecember 16, 1998
Term endedOctober 11, 2014
Application numberEP 94930790
Classification (CPC)H10P50/642 +2 more

Timeline

Timeline From EPO dates

1995199719992001200320052007200920112013Application filedOct 11, 1994PublishedSep 27, 1995Patent grantedDec 16, 1998Term endedOct 11, 2014

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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