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Expired European patentEurope

Plasma processing chamber and method of treating substrates in a plasma processing chamber

EP 0673056 B1 · Applicant: APPLIED MATERIALS, INC.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 15, 1995 and granted December 17, 1997. A European patent lasts at most 20 years from filing, so its term ended March 15, 2015.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by September 15, 2020.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 15, 1995
PublishedSeptember 20, 1995
GrantedDecember 17, 1997
Term endedMarch 15, 2015
Application numberEP 95103767
Classification (CPC)H01J37/32559 +1 more

Timeline

Timeline From EPO dates

1996199820002002200420062008201020122014Application filedMarch 15, 1995PublishedSep 20, 1995Patent grantedDec 17, 1997Term endedMarch 15, 2015

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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