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Expired European patentEurope

Apparatus and method for igniting plasma in a process module

EP 0665306 B1 · Applicant: TOKYO ELECTRON AMERICA Inc.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed January 19, 1995 and granted October 31, 2001. A European patent lasts at most 20 years from filing, so its term ended January 19, 2015.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by July 19, 2020.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJanuary 19, 1995
PublishedAugust 2, 1995
GrantedOctober 31, 2001
Term endedJanuary 19, 2015
Application numberEP 95100710
Classification (CPC)C23C16/50 +2 more

Timeline

Timeline From EPO dates

1996199820002002200420062008201020122014Application filedJan 19, 1995PublishedAug 2, 1995Patent grantedOct 31, 2001Term endedJan 19, 2015

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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