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Fine-processing apparatus using low-energy neutral particle beam

EP 0658917 A2 · Applicant: EBARA CORPORATION

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed December 12, 1994 and never granted as a European patent. Had it been granted, its 20-year term would have ended December 12, 2014.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by June 12, 2020.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledDecember 12, 1994
PublishedJune 21, 1995
GrantedNever granted
Term endedDecember 12, 2014
Application numberEP 94119595
Classification (CPC)H01J37/3053

Timeline

Timeline From EPO dates

1995199719992001200320052007200920112013Application filedDec 12, 1994PublishedJune 21, 1995Term endedDec 12, 2014

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.