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Expired European patentEurope

Plasma processing apparatus

EP 0578047 B1 · Applicant: NIPPON TELEGRAPH AND TELEPHONE CORPORATION

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Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed June 22, 1993 and granted May 13, 1998. A European patent lasts at most 20 years from filing, so its term ended June 22, 2013.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by December 22, 2018.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJune 22, 1993
PublishedJanuary 12, 1994
GrantedMay 13, 1998
Term endedJune 22, 2013
Application numberEP 93109961
Classification (CPC)H01J37/32192 +2 more

Timeline

Timeline From EPO dates

1994199619982000200220042006200820102012Application filedJune 22, 1993PublishedJan 12, 1994Patent grantedMay 13, 1998Term endedJune 22, 2013

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