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Expired European patentEurope

Minimization of particle generation in cvd reactors and methods

EP 0562035 B1 · Applicant: LAM RESEARCH CORPORATION

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed December 11, 1991 and granted September 30, 1998. A European patent lasts at most 20 years from filing, so its term ended December 11, 2011.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by June 11, 2017.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledDecember 11, 1991
PublishedSeptember 29, 1993
GrantedSeptember 30, 1998
Term endedDecember 11, 2011
Application numberEP 92903855
Classification (CPC)C23C16/4401 +2 more

Timeline

Timeline From EPO dates

1992199419961998200020022004200620082010Application filedDec 11, 1991PublishedSep 29, 1993Patent grantedSep 30, 1998Term endedDec 11, 2011

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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