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Method for treatment of semiconductor wafer

EP 0561577 A2 · Applicant: SHIN-ETSU HANDOTAI COMPANY LIMITED

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 12, 1993 and never granted as a European patent. Had it been granted, its 20-year term would have ended March 12, 2013.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by September 12, 2018.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 12, 1993
PublishedSeptember 22, 1993
GrantedNever granted
Term endedMarch 12, 2013
Application numberEP 93301922
Classification (CPC)H10P52/00 +2 more

Timeline

Timeline From EPO dates

1994199619982000200220042006200820102012Application filedMarch 12, 1993PublishedSep 22, 1993Term endedMarch 12, 2013

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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