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Chemical vapor deposition method for forming a deposited film with the use of a liquid raw material and apparatus suitable for practising said method

EP 0548990 B1 · Applicant: CANON KABUSHIKI KAISHA

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed December 28, 1992 and granted March 12, 1997. A European patent lasts at most 20 years from filing, so its term ended December 28, 2012.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by June 28, 2018.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledDecember 28, 1992
PublishedJune 30, 1993
GrantedMarch 12, 1997
Term endedDecember 28, 2012
Application numberEP 92122039
Classification (CPC)C23C16/18 +2 more

Timeline

Timeline From EPO dates

1993199519971999200120032005200720092011Application filedDec 28, 1992PublishedJune 30, 1993Patent grantedMarch 12, 1997Term endedDec 28, 2012

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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