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Expired European patentEurope

Semiconductor manufacturing apparatus

EP 0516136 B1 · Applicant: Tokyo Electron Kabushiki Kaisha

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed May 29, 1992 and granted March 13, 1996. A European patent lasts at most 20 years from filing, so its term ended May 29, 2012.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by November 29, 2017.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMay 29, 1992
PublishedDecember 2, 1992
GrantedMarch 13, 1996
Term endedMay 29, 2012
Application numberEP 92109073
Classification (CPC)H10P72/3308 +2 more

Timeline

Timeline From EPO dates

1993199519971999200120032005200720092011Application filedMay 29, 1992PublishedDec 2, 1992Patent grantedMarch 13, 1996Term endedMay 29, 2012

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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