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Expired European patentEurope

Method for halide etching in the presence of water of semi-conductor substrates

EP 0500670 B1 · Applicant: ASM INTERNATIONAL N.V.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed November 2, 1990 and granted August 10, 1994. A European patent lasts at most 20 years from filing, so its term ended November 2, 2010.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by May 2, 2016.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledNovember 2, 1990
PublishedSeptember 2, 1992
GrantedAugust 10, 1994
Term endedNovember 2, 2010
Application numberEP 90916827
Classification (CPC)H10P50/283

Timeline

Timeline From EPO dates

1991199319951997199920012003200520072009Application filedNov 2, 1990PublishedSep 2, 1992Patent grantedAug 10, 1994Term endedNov 2, 2010

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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