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Expired European patentEurope

Wafer processing reactor

EP 0473067 B1 · Applicant: APPLIED MATERIALS INC.

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed August 22, 1991 and granted January 3, 1996. A European patent lasts at most 20 years from filing, so its term ended August 22, 2011.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by February 22, 2017.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledAugust 22, 1991
PublishedMarch 4, 1992
GrantedJanuary 3, 1996
Term endedAugust 22, 2011
Application numberEP 91114081
Classification (CPC)C23C16/455

Timeline

Timeline From EPO dates

1992199419961998200020022004200620082010Application filedAug 22, 1991PublishedMarch 4, 1992Patent grantedJan 3, 1996Term endedAug 22, 2011

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.