Patent Yard Sign in
Expired European patentEurope

Localized vacuum apparatus and method

EP 0384754 B1 · Applicant: MICRION CORPORATION

EPO PDF

Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Google PatentsEPO PDF

Why it's free to use

  • Filed February 22, 1990 and granted May 14, 1997. A European patent lasts at most 20 years from filing, so its term ended February 22, 2010.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by August 22, 2015.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledFebruary 22, 1990
PublishedAugust 29, 1990
GrantedMay 14, 1997
Term endedFebruary 22, 2010
Application numberEP 90301905
Classification (CPC)H01J37/18

Timeline

Timeline From EPO dates

1991199319951997199920012003200520072009Application filedFeb 22, 1990PublishedAug 29, 1990Patent grantedMay 14, 1997Term endedFeb 22, 2010

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.