Device for plasma or reactive ion etching, and process for etching thermally poorly conducting substrates

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

• Filed October 19, 1988 and granted December 29, 1993. A European patent lasts at most 20 years from filing, so its term ended October 19, 2008.
• A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by April 19, 2014.
• We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.