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Expired European patentEurope

A sputtering method for fabricating thin film

EP 0345487 B1 · Applicant: FUJITSU LIMITED

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed May 13, 1989 and granted February 16, 1994. A European patent lasts at most 20 years from filing, so its term ended May 13, 2009.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by November 13, 2014.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMay 13, 1989
PublishedDecember 13, 1989
GrantedFebruary 16, 1994
Term endedMay 13, 2009
Application numberEP 89108689
Classification (CPC)C23C14/34 +1 more

Timeline

Timeline From EPO dates

1990199219941996199820002002200420062008Application filedMay 13, 1989PublishedDec 13, 1989Patent grantedFeb 16, 1994Term endedMay 13, 2009

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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