Process for producing interconnect structures on a semiconductor device, especially on an LSI circuit

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

• Filed April 17, 1989 and granted July 20, 1994. A European patent lasts at most 20 years from filing, so its term ended April 17, 2009.
• A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by October 17, 2014.
• We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.