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Expired European patentEurope

High-sensitivity, high-resolution positive-type electron-beam resist

EP 0343603 B1 · Applicant: Toppan Printing Co., Ltd.

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Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed May 23, 1989 and granted August 17, 1994. A European patent lasts at most 20 years from filing, so its term ended May 23, 2009.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by November 23, 2014.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMay 23, 1989
PublishedNovember 29, 1989
GrantedAugust 17, 1994
Term endedMay 23, 2009
Application numberEP 89109284
Classification (CPC)G03F7/039

Timeline

Timeline From EPO dates

1990199219941996199820002002200420062008Application filedMay 23, 1989PublishedNov 29, 1989Patent grantedAug 17, 1994Term endedMay 23, 2009

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