Expired European patentEurope
A silicon grid as a reference and calibration standard in a particle beam lithography system
EP 0333098 B1 · Applicant: Etec Systems, Inc.
Overview
The published document from the EPO: abstract, claims, description and drawings. Open it full size
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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed March 13, 1989 and granted November 9, 1994. A European patent lasts at most 20 years from filing, so its term ended March 13, 2009.
- A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by September 13, 2014.
- We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 13, 1989
PublishedSeptember 20, 1989
GrantedNovember 9, 1994
Term endedMarch 13, 2009
Application numberEP 89104398
Classification (CPC)B82Y40/00 +2 more
Timeline
Timeline From EPO dates
Sources & verification
Official EPO records
Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.