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Expired European patentEurope

Apparatus for performing heat treatment on semiconductor wafers

EP 0306967 B1 · Applicant: HITACHI, LTD.

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed September 9, 1988 and granted April 16, 1997. A European patent lasts at most 20 years from filing, so its term ended September 9, 2008.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by March 9, 2014.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledSeptember 9, 1988
PublishedMarch 15, 1989
GrantedApril 16, 1997
Term endedSeptember 9, 2008
Application numberEP 88114763
Classification (CPC)H10P72/3308 +2 more

Timeline

Timeline From EPO dates

1989199119931995199719992001200320052007Application filedSep 9, 1988PublishedMarch 15, 1989Patent grantedApril 16, 1997Term endedSep 9, 2008

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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