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Expired European patentEurope

Lithographic mask for obtaining patterns

EP 0278076 B1 · Applicant: Dr. Johannes Heidenhain GmbH

EPO PDF

Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed November 24, 1987 and granted April 7, 1993. A European patent lasts at most 20 years from filing, so its term ended November 24, 2007.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by May 24, 2013.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledNovember 24, 1987
PublishedAugust 17, 1988
GrantedApril 7, 1993
Term endedNovember 24, 2007
Application numberEP 87117249
Classification (CPC)G03F1/38 +1 more

Timeline

Timeline From EPO dates

1988199019921994199619982000200220042006Application filedNov 24, 1987PublishedAug 17, 1988Patent grantedApril 7, 1993Term endedNov 24, 2007

Sources & verification