Patent Yard Sign in
European application, no grantEurope

Anode plate for a parallel-plate reactive ion etching reactor

EP 0266604 A2 · Applicant: International Business Machines Corporation

EPO PDF

Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Google PatentsEPO PDF

Why it's free to use

  • Filed October 16, 1987 and never granted as a European patent. Had it been granted, its 20-year term would have ended October 16, 2007.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by April 16, 2013.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledOctober 16, 1987
PublishedMay 11, 1988
GrantedNever granted
Term endedOctober 16, 2007
Application numberEP 87115184
Classification (CPC)H01J37/32431

Timeline

Timeline From EPO dates

1988199019921994199619982000200220042006Application filedOct 16, 1987PublishedMay 11, 1988Term endedOct 16, 2007

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.