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Expired European patentEurope

Method and apparatus of treating photoresists

EP 0239669 B1 · Applicant: USHIO DENKI KABUSHIKI KAISHA

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed November 25, 1986 and granted March 3, 1993. A European patent lasts at most 20 years from filing, so its term ended November 25, 2006.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by May 25, 2012.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledNovember 25, 1986
PublishedOctober 7, 1987
GrantedMarch 3, 1993
Term endedNovember 25, 2006
Application numberEP 86116311
Classification (CPC)G03F7/2024

Timeline

Timeline From EPO dates

1987198919911993199519971999200120032005Application filedNov 25, 1986PublishedOct 7, 1987Patent grantedMarch 3, 1993Term endedNov 25, 2006

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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