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Expired European patentEurope

Method of applying poly(methacrylic anhydride) resist to a semiconductor

EP 0185016 B1 · Applicant: Hughes Aircraft Company

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Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed August 27, 1984 and granted November 17, 1988. A European patent lasts at most 20 years from filing, so its term ended August 27, 2004.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by February 27, 2010.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledAugust 27, 1984
PublishedJune 25, 1986
GrantedNovember 17, 1988
Term endedAugust 27, 2004
Application numberEP 84903268
Classification (CPC)G03F7/039 +2 more

Timeline

Timeline From EPO dates

1985198719891991199319951997199920012003Application filedAug 27, 1984PublishedJune 25, 1986Patent grantedNov 17, 1988Term endedAug 27, 2004

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.