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Expired European patentEurope

Photolithographic method and combination including barrier layer

EP 0173881 B1 · Applicant: MicroSi, Inc. (a Delaware corporation)

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed August 8, 1985 and granted December 16, 1992. A European patent lasts at most 20 years from filing, so its term ended August 8, 2005.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by February 8, 2011.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledAugust 8, 1985
PublishedMarch 12, 1986
GrantedDecember 16, 1992
Term endedAugust 8, 2005
Application numberEP 85110019
Classification (CPC)G03F7/091

Timeline

Timeline From EPO dates

1986198819901992199419961998200020022004Application filedAug 8, 1985PublishedMarch 12, 1986Patent grantedDec 16, 1992Term endedAug 8, 2005

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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