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Expired European patentEurope

Apparatus for and method of controlling magnetron sputter device having separate confining magnetic fields to separate targets subject to separate discharges

EP 0163446 B1 · Applicant: VARIAN ASSOCIATES, INC.

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed May 10, 1985 and granted November 14, 1990. A European patent lasts at most 20 years from filing, so its term ended May 10, 2005.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by November 10, 2010.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMay 10, 1985
PublishedDecember 4, 1985
GrantedNovember 14, 1990
Term endedMay 10, 2005
Application numberEP 85303332
Classification (CPC)H01J37/3408 +2 more

Timeline

Timeline From EPO dates

1986198819901992199419961998200020022004Application filedMay 10, 1985PublishedDec 4, 1985Patent grantedNov 14, 1990Term endedMay 10, 2005

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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