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Expired European patentEurope

Wafer height correction system for focused beam system

EP 0148856 B1 · Applicant: Hughes Aircraft Company

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed May 21, 1984 and granted July 27, 1988. A European patent lasts at most 20 years from filing, so its term ended May 21, 2004.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by November 21, 2009.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMay 21, 1984
PublishedJuly 24, 1985
GrantedJuly 27, 1988
Term endedMay 21, 2004
Application numberEP 84902184
Classification (CPC)H01J37/20 +2 more

Timeline

Timeline From EPO dates

1985198719891991199319951997199920012003Application filedMay 21, 1984PublishedJuly 24, 1985Patent grantedJuly 27, 1988Term endedMay 21, 2004

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.